PhD: Patterning of 2D materials by EUV light and area-selective processing

Research

The goal of this PhD project is to work towards a new paradigm of resist-free patterning of 2D materials such as MoS2 and WS2. 2D transition metal dichalcogenides (TMDs) will play a central role in scaling nanoelectronics beyond silicon limits. In order to integrate 2D TMDs in ultra-scaled CMOS devices, developing a patterning technology via state-of-the-art extreme ultraviolet (EUV) lithography is essential, however this comes with a new set of challenges related to the ultra-thin body of these layers.

In this pathfinding project, approaches for resist-free patterning will be developed by uniting area-selective processing technology and EUV lithography. Area-selective deposition (ASD), etching and modification of 2D TMDs will be achieved using state-of-the-art atomic layer deposition (ALD) and atomic layer etching (ALE) techniques. Please see for more information: https://spie.org/advanced-lithography/presentation/Advanced-EUV-patterning-of-2D-TMDs-for-CMOS-integration/12956-47  and https://pubs.acs.org/doi/10.1021/acs.chemmater.8b03454

Project & Job description

We are looking for a PhD student who is interested in performing experimental studies towards the development of resist-free patterning. A variety of experimental techniques will be employed to obtain insights into the growth and the surface chemistry such as in-situ ellipsometry and Fourier transform infrared spectroscopy. The impact of surface modification using EUV patterning and ALD/ALE will be studied for different materials. The experimental studies will be complemented with theoretical studies together with other project members. The project will be carried out in strong collaboration with ASML.

Location

The work will be performed in the group Plasma & Materials Processing and in the NanoLab cleanroom at the Department of Applied Physics at the TU/e. The PMP group focuses on the advancement of the science and technology of plasma and materials processing, a research area which is in essence multidisciplinary and encompasses the research fields of plasma physics, surface science, and materials science. The scientific objective of the group is to obtain 'atomic' level understanding of the interaction of plasmas and gases with materials.

Qualifications:

For this PhD position, we are looking for a highly talented, enthusiastic, and exceptionally motivated candidate with MSc degree (or equivalent) in (Applied) Physics, Chemistry, Chemical Engineering, Material Science, Electrical Engineering, or similar. The candidate must have a strong background in either physics or chemistry. Experience in the areas of patterning, surface science or thin film deposition would be an asset. To facilitate the collaboration within the project, the candidate should have interest in device fabrication schemes. Good communication skills in English (both written and spoken) are required.

Responsibilities and tasks:

• Investigation of the interaction of photons, electrons, and plasmas with 2D materials using in-situ techniques.
• Development of area-selective processes, analysis of the deposited films, and demonstration of the selectivity.
• Report results to collaborators, preparation of scientific papers and conference presentations.
• Daily supervision of BSc, and MSc students.

Job Requirements

• MSc degree in (Applied) Physics, Chemistry, Chemical Engineering, Material Science, Electrical Engineering, or a comparable domain.
• Excellent mastering of the English language, good communication skills. Note that there is no Dutch language requirement.
• Be a team player and able to work in a dynamic, interdisciplinary context.

A meaningful job in a dynamic and ambitious university, in an interdisciplinary setting and within an international network. You will work on a beautiful, green campus within walking distance of the central train station. In addition, we offer you:

• Full-time employment for four years, with an intermediate evaluation (go/no-go) after nine months. You will spend 10% of your employment on teaching tasks.
• Salary and benefits (such as a pension scheme, paid pregnancy and maternity leave, partially paid parental leave) in accordance with the Collective Labour Agreement for Dutch Universities, scale P (min. €2,872 max. €3,670).
• A year-end bonus of 8.3% and annual vacation pay of 8%.
• High-quality training programs and other support to grow into a self-aware, autonomous scientific researcher. At TU/e we challenge you to take charge of your own learning process.
• An excellent technical infrastructure, on-campus children's day care and sports facilities.
• An allowance for commuting, working from home and internet costs.
• A Staff Immigration Team and a tax compensation scheme (the 30% facility) for international candidates.